Semiconductors · Laser cvd

Laser Assisted Chemical Vapor Deposition (LA-CVD)

Tim Thomas Technical Director, Optical Systems

November 1st, 2013

I'm interested in laser assisted CVD.  Does anyone have any suggested reading or interest to pursue developing a working demonstration system?

Steven Nagle Entrepreneur/Teacher/Manager

November 1st, 2013

Does it provide a great benefit over ion assisted CVD?

Tim Thomas Technical Director, Optical Systems

November 3rd, 2013

Hi Steven, When comparing ion assisted and laser assisted CVD, one needs to consider what the desired film or layer that is to be achieved. In the case of ion assistance, the ions themselves may be used to disassociate other species out of injected gases for the layer of interest, leaving the ion gun ions as undesirable artifacts. Since the laser isn't an ion beam, there is no implanted ion from the beam. The laser assisted system may be much faster than the ion assisted system. The ion beam will also cause crystalline materials to become amorphous if the ion beam ions are directed toward the growth surface. The laser can assist to produce the desired chemistry and, at the same time and by adjusting the energy levels, convert amorphous layers to crystalline if the seed or host crystal surfaces exist and if the geometry and distance are consistent with the thermal profile created by the beam pulse.